ROLL-TO-ROLL LDI

Roll-to-Roll FPC LDI

Continuous roll-to-roll exposure for FPC, BMS and metallic etching of roll materials — up to 200 m/h, 520×2000 mm web.

Series Highlights

Values depend on model configuration

200 m/hThroughput · RTR535
520×2000 mmMax exposure area
L/S 25/25 µmResolution · RTR412
405 nmWavelength
Specifications

Full parameters of all 2 models

ItemRTR535RTR412
Platform typePatterning-RTRPatterning-RTR
ApplicationsFPC, BMS,
Metallic etching (for roll material)
FPC, BMS,
Metallic etching (for roll material)
Number of lenses54
Wavelength405 nm405 nm
Max exposure area520×2000 mm250×800 mm
MP resolutionL/S = 50/50 μmL/S = 25/25 μm
Outer layer alignment accuracy±12 μm±8 μm
Inner layer alignment accuracy//
Throughput200 m/h
@500×2000mm @50 mj/cm²
75 m/h
@250×800mm @50 mj/cm²
Line width tolerance±10%±10%
DOF±300 μm±100 μm
Scale modeFixed scale / Auto scale / Interval scale / Partition alignment
File formatGerber274x / ODB++
Equipment size6436×1895×2152 mm2500×1700×2150 mm
Equipment weight7.5 T4.5 T
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